CHY-T1280A-3Z4C Laboratory CVD Tube Furnace with O.D80*1000mm Quartz Tube Laboratory CVD Tube Furnace CVD machine price
1.O.D80*1000mm high purity quartz tube
2.High quality ceramic fiber chamber
3.PID Programmable controller
4.Three gas way mass flow controller with precision gas flow controller
5.Two stage Vacuum Pump
5.Made by Henan Chengyi
CHENGYI-CVD System APPLICATION
1.Laboratory heat thermal processing
2.High Vacuum Sintering Heating Annealing Brazing
3.Laboratory Thin Film Preparation,Nano tube growthing
4.Laboratory CVD system,graphene growthing,preparation.
PRODUCT PARAMETERS
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Product Name
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1200 degree CVD Furnace
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Modle No.
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CHY-T1280A-3Z4C
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Heating zones
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Single heating zone
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Heating zone length
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400mm
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Constant temperature zone length
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200mm
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Tube Material
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high purity quartz tube
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Tube diameter
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O.D80*I.D74*1000mm Quartz Tube
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|
Tube Length
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1000mm,750mm,1000mm,1200mm as enquiry
|
|
Thermcouple
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K type
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Maximum heating temper
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1150 dgree
|
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Heating rate
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20c/min,adjustable suggestion 10 degree/min
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Heating element
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Fe-Co-Al by Mo alloy
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Sealing Method
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stainless steel vacuum flange
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Vacuum Air-tightness
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9.8×10-4Pa
|
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Temperature Accuracy
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±1℃
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Control Mode
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Intelligent PID programmable Control,30 steps sintering curve restore
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|
Mass Flow Controller
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3 gas way mass flow controller
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Flowmeter Core
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304 stainless steel
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Measure Accuracy
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+/- 1.0% F.S
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|
Pressure Range
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-0.1~0.15MPa
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|
A way gas range
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0~100SCCM
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B way gas range
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0~200SCCM
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C way gas range
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0~500SCCM
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Vacuum Pump
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4C
|
|
Power Supply
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AC220V 50Hz
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https://www.hnchengyi.com/cvd-system/chy-t1280a-3z4c-cvd-tube-furnace.html
